A study on MEMS oscillators‘ frequency drift of temperature
The frequency output of oscillators is subject to a series of factors, such as working temperature, humidity, shock and vibration. Most of these factors are related to the manufacturing processes and packaging techniques employed in the semiconductor industry. Among the above factors, the influence...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2018-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://doi.org/10.1051/matecconf/201818911002 |