Design and Experimental Research of a Rotary Micro-Actuator Based on a Shearing Piezoelectric Stack
The working principle of a rotating micro-actuator based on a piezoelectric stack was theoretically analyzed and experimentally verified. The actuator is compact in structure, and the key component is the shearing piezoelectric stack. The piezoelectric stack is used to drive the micro-rotor via an e...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2019-01-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/10/2/96 |