Large-scale and contact-free fabrication of microwell arrays based on electro-pressure of depositing ions
Microwell arrays are showing great potentials for various optoelectronic and biological applications. However, large-scale fabrication of microwell arrays remains a big challenge to modern micro- and nanotechnology. Here, we report a novel fabrication method that can produce massive aligned microwel...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2019-04-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5092673 |