Periodical getter cleaning of the gas environment inside a device
Recent years have seen extensive development of new types of electro-mechanical devices, intended for use as sensors rotations and angular rates. They all tend to comprise any type of mechanical resonators which are sensitive to fluctuations in the rotational motion. Achievement of stable characteri...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
MGTU im. N.È. Baumana
2014-01-01
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| Series: | Nauka i Obrazovanie |
| Subjects: | |
| Online Access: | http://technomag.edu.ru/jour/article/view/631 |