Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study

The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrica...

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Bibliographic Details
Main Authors: Jens Twiefel, Anatoly Glukhovkoy, Sascha de Wall, Marc Christopher Wurz, Merle Sehlmeyer, Moritz Hitzemann, Stefan Zimmermann
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/21/7/2533