Resonant Biaxial Nanoprobe Utilized for Non-Contact Surface Measurements
In this work a non-contact biaxial nanoprobe for surface profile scans of macroscopic objects with 150 nm accuracy is presented. The biaxial nanoprobe oscillates in two directions to overcome the challenges of sticking in contact mode. Two electrostatic actuators drive the nanoprobe while two electr...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2013-10-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/october_2013/P_1444.pdf |