Broadband Lumped-Element Parameter Extraction Method of Two-Port 3D MEMS In-Chip Solenoid Inductors Based on a Physics-Based Equivalent Circuit Model

Broadband Lumped-Element Parameter Extraction Method of Two-Port 3D MEMS In-Chip Solenoid Inductors Based on a Physics-Based Equivalent Circuit Model

Integrated 2D spiral inductors possess low inductance per unit area, which limits their application range. However, the state of investigation into the lumped-element parameter extraction method for integrated 3D in-chip multi-turn solenoid inductors, which possess higher inductance per unit area, i...

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Bibliographic Details
Main Authors: Jiamian Sun, Haiwang Li, Sifan Wu, Tiantong Xu, Hanqing Li, Hanxiao Wu, Shuangzhi Xia
Format: Article
Language:English
Published: MDPI AG 2020-09-01
Series:Micromachines
Subjects:
lumped-element parameter extraction
microelectromechanical systems (MEMS)
in-chip solenoid inductor
physics-based equivalent circuit model
Online Access:https://www.mdpi.com/2072-666X/11/9/836

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