Design, fabrication and characterization of glass phase steps for application in phase shifting interferometry
In this paper, we report on the design and fabrication of a low-cost phase shifter for application in phase shifting interferometry. Phase shifting interferometry is a powerful method for surface characterization. It uses interference data recorded during a series of predetermined phase shifts to re...
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| Format: | Article |
| Language: | English |
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Isfahan University of Technology
2019-03-01
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| Series: | Iranian Journal of Physics Research |
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| Online Access: | http://ijpr.iut.ac.ir/browse.php?a_code=A-10-3044-1&slc_lang=en&sid=1 |