Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance
Abstract Micro-Electro-Mechanical Systems revolutionized the consumer market for their small dimensions, high performances and low costs. In recent years, the evolution of the Internet of Things is posing new challenges to MEMS designers that have to deal with complex multiphysics systems experienci...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2021-08-01
|
| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-021-95793-y |