Stability of Chlorine Termination on Ge(100) and Ge(111) Surfaces
The different cleaning solution; HCl and HF solution are used to remove the suboxide and oxide component on Ge surface. The HCl cleaning results chlorine (Cl) termination on Ge surface whereas no Fluorine (F) termination was observed just after HF cleaning. The growth of Ge oxide is studied after tr...
Main Authors: | , , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
EDP Sciences
2017-01-01
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Series: | MATEC Web of Conferences |
Online Access: | https://doi.org/10.1051/matecconf/20178705005 |