Potentiometric CO2 Sensor Using Li Ion Conducting Li3PO4Thin Film Electrolyte
Li+ ion conducting Li3PO4 thin film electrolytes with thickness 300nm, 650nm and1.2μm were deposited on Al2O3 substrate at room temperature by thermal evaporation method.Reference and sensing electrodes were printed on Au interfaces by conventional screen printingtechnique. The overall dimension...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2005-11-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/5/11/465/ |