Design of a hexagonal air-coupled capacitive micromachined ultrasonic transducer for air parametric array
An air parametric array can generate a highly directional beam of audible sound in air, which has a wide range of applications in targeted audio delivery. Capacitive micromachined ultrasonic transducer (CMUTs) have great potential for air-coupled applications, mainly because of their low acoustic im...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-03-01
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| Series: | Nanotechnology and Precision Engineering |
| Online Access: | http://dx.doi.org/10.1063/10.0003504 |