Luminescence of insulator layers on silicon excited by electrons
We present a comparative analysis of cathodoluminescence (CL) and electroluminescence (EL) spectra measured on Si–SiO2 and Si–Ta2O5 structures with various thicknesses of insulator layers. Spectral distribution of luminescence depends on how the insulator layer was formed, its thickness and type of...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Herzen State Pedagogical University of Russia
2021-03-01
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| Series: | Physics of Complex Systems |
| Subjects: | |
| Online Access: | https://physcomsys.ru/index.php/physcomsys/article/view/43 |