A micro-capacitive pressure sensor design and modelling
Measuring air pressure using a capacitive pressure sensor is a robust and precise technique. In addition, a system that employs such transducers lies within the low power consumption applications such as wireless sensor nodes. In this article a high sensitivity with an elliptical diaphragm capacitiv...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2016-03-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | http://www.j-sens-sens-syst.net/5/95/2016/jsss-5-95-2016.pdf |