Labeling Confidence Values for Wafer-Handling Robot Arm Performance Using a Feature-Based General Regression Neural Network and Genetic Algorithm

Labeling Confidence Values for Wafer-Handling Robot Arm Performance Using a Feature-Based General Regression Neural Network and Genetic Algorithm

The prognosis and management of machine health statuses are emerging research topics. In this study, the performance degradation of a wafer-handling robot arm (WHRA) was predicted using the proposed machine-learning approach. This method considers the eccentric vertical and planar position deviation...

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Bibliographic Details
Main Authors: Yi-Cheng Huang, Zi-Sheng Yang, Hsien-Shu Liao
Format: Article
Language:English
Published: MDPI AG 2019-10-01
Series:Applied Sciences
Subjects:
prognostic and health management
wafer-handling robot arm
feature extraction
general regression neural network
logistic regression
Online Access:https://www.mdpi.com/2076-3417/9/20/4241

Internet

https://www.mdpi.com/2076-3417/9/20/4241

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