Factors affecting the properties of highly conductive flexible ultrathin ITO films in confined large area magnetron sputtering in three dimensions
A large area magnetron source with the strongly confined magnetic field from all direction is applied for the deposition of flexible ultrathin ITO (UT-ITO) films of thickness 30 nm at room temperature for their applications as transparent electrodes. The films show a minimum resistivity of ∼5.0 x 10...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-10-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5053570 |