Energy trapping of thickness-extensional modes in thin film bulk acoustic wave filters
This paper presents the thickness-extensional vibration of a rectangular piezoelectric thin film bulk acoustic wave filter with two pairs of electrodes symmetrically deposited on the center of the zinc oxide film. The two-dimensional scalar differential equations which were first derived to describe...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-01-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4939695 |