A Hybrid Vehicle Dispatching Approach for Unified Automated Material Handling System in 300mm Semiconductor Wafer Fabrication System
The automation of unified automated material handling system (UAMHS) in 300mm semiconductor wafer fabrication system (SWFS) is complex due to complicated product mixes, numerous and dynamic transportation demands, transportation deadlock, and vehicle blockages. Vehicle dispatching has become one of...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8918475/ |