Lateral variations of the surface electric potential and elastic stiffness of ultrathin Hf0.5Zr0.5O2 films on silicon
Lateral variations of the surface electric potential and the elastic properties of ultrathin HfxZr1−xO2 films have strong impact on the performance of lead-free ferroelectric devices. Here, we compared lateral uniformity of electric and elastic properties of polycrystalline thin Hf0.55Zr0.45O2 films...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-01-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0029547 |