3-D Design and Simulation of a Piezoelectric Micropump

3-D Design and Simulation of a Piezoelectric Micropump

The objective of this paper is to carefully study the performances of a new piezoelectric micropump that could be used, e.g., for drug delivery or micro-cooling systems. The proposed micropump is characterized by silicon diaphragms, with a piezoelectric actuation at a 60 V input voltage, and by two...

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Bibliographic Details
Main Authors: Seyed Amir Fouad Farshchi Yazdi, Alberto Corigliano, Raffaele Ardito
Format: Article
Language:English
Published: MDPI AG 2019-04-01
Series:Micromachines
Subjects:
piezoelectric material
multiphysics simulation
finite element method (FEM)
fluid–structure interaction (FSI)
micro electromechanical systems (MEMS)
Online Access:https://www.mdpi.com/2072-666X/10/4/259

Internet

https://www.mdpi.com/2072-666X/10/4/259

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