Model Research On Deposition Of Pure Aluminium Oxide Layers By MOCVD Method

The purpose of this research is to develop an optimal method for synthesizing of nanocrystalline Al2O3 monolayers at high growth rates on cemented carbides coated with an intermediate layer of pre-Al2O3-C (composite layers Al2O3-C/Al2O3). The use of quartz glass substrate allows for obtaining inform...

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Bibliographic Details
Main Authors: Sawka A., Kwatera A.
Format: Article
Language:English
Published: Polish Academy of Sciences 2015-06-01
Series:Archives of Metallurgy and Materials
Subjects:
Online Access:http://www.degruyter.com/view/j/amm.2015.60.issue-2/amm-2015-0269/amm-2015-0269.xml?format=INT

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