Model Research On Deposition Of Pure Aluminium Oxide Layers By MOCVD Method
The purpose of this research is to develop an optimal method for synthesizing of nanocrystalline Al2O3 monolayers at high growth rates on cemented carbides coated with an intermediate layer of pre-Al2O3-C (composite layers Al2O3-C/Al2O3). The use of quartz glass substrate allows for obtaining inform...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Polish Academy of Sciences
2015-06-01
|
| Series: | Archives of Metallurgy and Materials |
| Subjects: | |
| Online Access: | http://www.degruyter.com/view/j/amm.2015.60.issue-2/amm-2015-0269/amm-2015-0269.xml?format=INT |