Quantum electromechanics on silicon nitride nanomembranes
Preparation and detection of mechanical objects at the quantum zero-point level has been achieved in both the optical and microwave regimes. Here, the authors develop silicon nitride nanomembranes that are suitable for integrating nanophotonic, nanomechanical and superconducting microwave circuits t...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2016-08-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/ncomms12396 |