Characterizing time-dependent mechanics in metallic MEMS
Experiments for characterization of time-dependent material properties in free-standing metallic microelectromechanical system (MEMS) pose challenges: e.g. fabrication and handling (sub)-μm sized specimens, control and measurement of sub-μN loads and sub-μm displacements over long periods and variou...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2010-06-01
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| Series: | EPJ Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/epjconf/20100640002 |