A Slope-Adapted Sample-Tilting Method for Profile Measurement of Microstructures with Steep Surfaces
This paper presents a slope-adapted sample-tilting method for the profile measurement of microstructures with steep surfaces. Distinct from the traditional scanning method that has the restriction of a maximum detectable angle, this method corrects the sample-stylus relative angle during the measure...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2015-01-01
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| Series: | Journal of Nanomaterials |
| Online Access: | http://dx.doi.org/10.1155/2015/253062 |