Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers
We use a soft templating approach in combination with evaporation induced self-assembly to prepare mesoporous films containing cylindrical pores with elliptical cross-section on an ordered pore lattice. The film is deposited on silicon-based commercial atomic force microscope (AFM) cantilevers using...
Main Authors: | , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Beilstein-Institut
2016-04-01
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Series: | Beilstein Journal of Nanotechnology |
Subjects: | |
Online Access: | https://doi.org/10.3762/bjnano.7.56 |