Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

We use a soft templating approach in combination with evaporation induced self-assembly to prepare mesoporous films containing cylindrical pores with elliptical cross-section on an ordered pore lattice. The film is deposited on silicon-based commercial atomic force microscope (AFM) cantilevers using...

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Bibliographic Details
Main Authors: Christian Ganser, Gerhard Fritz-Popovski, Roland Morak, Parvin Sharifi, Benedetta Marmiroli, Barbara Sartori, Heinz Amenitsch, Thomas Griesser, Christian Teichert, Oskar Paris
Format: Article
Language:English
Published: Beilstein-Institut 2016-04-01
Series:Beilstein Journal of Nanotechnology
Subjects:
Online Access:https://doi.org/10.3762/bjnano.7.56