Scaling and Modeling of High Temperature 4H-SiC p-i-n Photodiodes
4H-SiC p-i-n photodiodes with various mesa areas (40 000 μm<sup>2</sup>, 2500 μm<sup>2</sup>, 1600 μm<sup>2</sup>, and 400 μm<sup>2</sup>) have been fabricated. Both C-V and I-V characteristics of the photodi...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2018-01-01
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Series: | IEEE Journal of the Electron Devices Society |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/8240922/ |