V<sub>2</sub>O<sub>5</sub> Thin Films as Nitrogen Dioxide Sensors <xref rid="fn1-sensors-375730" ref-type="fn">†</xref>
Vanadium pentoxide thin films were deposited onto insulating support by means of rf reactive sputtering from a metallic vanadium target. Argon-oxygen gas mixtures of different compositions controlled by the flow rates were used for sputtering. X-ray diffraction at glancing incidence (GIXD) and Scann...
Main Authors: | , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2018-11-01
|
Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/18/12/4177 |