Vacuum methods of surface treatment with subnanometer roughness
Vacuum methods of surfaces with 1 nm or less roughness treatment were analyzed.Physical models of super sleek surfaces polishing into vacuum cambers by means of ion beam etching and thin film deposition and ion cluster treatment were shown.The results of experimental research of ion cluster polishin...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2018-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://doi.org/10.1051/matecconf/201822401117 |