The Forming Process Researched in Sandblasting Separation of Masked Silicon Wafers

The Forming Process Researched in Sandblasting Separation of Masked Silicon Wafers

<p>The object of study is a semiconductor silicon disc-crystal currently used in the design of semiconductor diodes. The disc-crystal is manufactured by the sandblasting separation of a premasked silicon wafer into individual elements. The crystal has frustum-of-a-cone shape with its top diame...

Full description

Bibliographic Details
Main Authors: V. V. Zhukov, A. A. Gornichev, S. A. Stepanov
Format: Article
Language:Russian
Published: MGTU im. N.È. Baumana 2016-01-01
Series:Nauka i Obrazovanie
Subjects:
microwave diode
silicon plate
disc-crystal
sandblasting cutting
abrasive material
masking material
Online Access:http://technomag.edu.ru/jour/article/view/51

Similar Items

Similar Items