The Forming Process Researched in Sandblasting Separation of Masked Silicon Wafers
<p>The object of study is a semiconductor silicon disc-crystal currently used in the design of semiconductor diodes. The disc-crystal is manufactured by the sandblasting separation of a premasked silicon wafer into individual elements. The crystal has frustum-of-a-cone shape with its top diame...
| Main Authors: | , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
MGTU im. N.È. Baumana
2016-01-01
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| Series: | Nauka i Obrazovanie |
| Subjects: | |
| Online Access: | http://technomag.edu.ru/jour/article/view/51 |