Investigations of the Effects of Geometric Imperfections on the Nonlinear Static and Dynamic Behavior of Capacitive Micomachined Ultrasonic Transducers

In order to investigate the effects of geometric imperfections on the static and dynamic behavior of capacitive micomachined ultrasonic transducers (CMUTs), the governing equations of motion of a circular microplate with initial defection have been derived using the von Kármán plat...

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Bibliographic Details
Main Authors: Aymen Jallouli, Najib Kacem, Joseph Lardies
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/9/11/575