3D TCAD Analysis Enabling ESD Layout Design Optimization

On-chip electrostatic discharge (ESD) protection design for integrated circuits (ICs) is a challenging design-for-reliability problem. Since ESD events involve very high current transients in very short time period, current crowding is unavoidable, which leads to local overheating and creates local...

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Bibliographic Details
Main Authors: Zijin Pan, Cheng Li, Mengfu Di, Feilong Zhang, Albert Wang
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
2D
3D
ESD
Online Access:https://ieeexplore.ieee.org/document/9207763/