Electrical and Physical Characteristics of WO3/Ag/WO3 Sandwich Structure Fabricated with Magnetic-Control Sputtering Metrology †

In this work, three layers of transparent conductive films of WO3/Ag/WO3 (WAW) were deposited on a glass substrate by radio frequency (RF) magnetron sputtering. The thicknesses of WO3 (around 50~60 nm) and Ag (10~20 nm) films were mainly the changeable factors to achieve the optimal transparent cond...

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Bibliographic Details
Main Authors: Shea-Jue Wang, Mu-Chun Wang, Shih-Fan Chen, Yu-Hsiang Li, Tien-Szu Shen, Hui-Yun Bor, Chao-Nan Wei
Format: Article
Language:English
Published: MDPI AG 2018-08-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/18/9/2803