Modelling focused electron beam induced deposition beyond Langmuir adsorption

Modelling focused electron beam induced deposition beyond Langmuir adsorption

In this work, the continuum model for focused electron beam induced deposition (FEBID) is generalized to account for multilayer adsorption processes. Two types of adsorption energies, describing both physisorption and spontaneous chemisorption, are included. Steady state solutions under no diffusion...

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Bibliographic Details
Main Authors: Dédalo Sanz-Hernández, Amalio Fernández-Pacheco
Format: Article
Language:English
Published: Beilstein-Institut 2017-10-01
Series:Beilstein Journal of Nanotechnology
Subjects:
adsorption isotherm theory
BET model
continuum model
focused electron beam induced deposition
3D nanoprinting
Langmuir model
Online Access:https://doi.org/10.3762/bjnano.8.214

Internet

https://doi.org/10.3762/bjnano.8.214

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