Enhancement in external quantum efficiency of AlGaInP red μ-LED using chemical solution treatment process
Abstract To investigate the effects of their surface recovery and optical properties, extremely small sized (12 µm × 12 µm mesa area) red AlGaInP micro light emitting diodes ( $$\upmu$$ μ LED) were fabricated using a diluted hydrofluoric acid (HF) surface etch treatment. After the chemical treatment...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2021-02-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-021-83933-3 |