Effects of annealing process on morphology and mechanical properties of magnetron sputtered LiCoO<sub>2</sub> thin films

Effects of annealing process on morphology and mechanical properties of magnetron sputtered LiCoO<sub>2</sub> thin films

LiCoO<sub>2</sub> thin films were prepared on single crystal Si (100) by magnetron sputtering method and then annealed by different annealing temperatures, holding times and atmospheres. The effects of annealing processes on the surface morphologies, compositions, crystal structures and...

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Bibliographic Details
Main Authors: MA Yibo, CHEN Mu, YAN Yue, ZHANG Xiaofeng, LIU Weiming, LI Jiaming, ZHANG Xuan
Format: Article
Language:zho
Published: Journal of Aeronautical Materials 2019-12-01
Series:Journal of Aeronautical Materials
Subjects:
licoo<sub>2</sub> film
surface topography
hardness
young’s modulus
friction coefficient
Online Access:http://jam.biam.ac.cn/CN/Y2019/V39/I6/90

Internet

http://jam.biam.ac.cn/CN/Y2019/V39/I6/90

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