Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam
We mainly analyze the dynamic characteristics of electrostatically actuated shape optimized variable geometry microbeam. A nonlinear dynamic model considering midplane stretching, electrostatic force, and electrical field fringing effects is developed. Firstly, we study the static responses of the o...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2015-01-01
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| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.1155/2015/867171 |