Effect of heat treatment on thermoelectric properties of tungsten-rhenium thin-film thermocouples by RF magnetron sputtering
Tungsten-rhenium thin-film thermocouples (TFTCs) are designed by finite element analysis (FEA) and fabricated based on radio frequency (RF) magnetron sputtering technology to meet the requirement of high temperature measurement in narrow space. The changes with thickness and thermoelectric property...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-12-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5074126 |