Finite Element Analysis of Static and Dynamic Pull-In Instability of a Fixed-Fixed Micro Beam Considering Damping Effects
In this paper the static and dynamic pull-in phenomenon of a fixed-fixed micro beam, considering the effects of residual stress, axial stress, damping coefficient, and Fringing field effects have statically and dynamically been analyzed. The nonlinear electromechanical coupled integro- differential...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2009-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_09/P_420.pdf |
| Summary: | In this paper the static and dynamic pull-in phenomenon of a fixed-fixed micro beam, considering the effects of residual stress, axial stress, damping coefficient, and Fringing field effects have statically and dynamically been analyzed. The nonlinear electromechanical coupled integro- differential equation governing the problem has been derived using variational principle and solved using a computer code based on Finite element method. The problem has been solved for various values of damping coefficients, residual and axial stresses, and various initial gaps between the micro beam and the substrate. The results showed that by increase in damping coefficient the dynamic pull-in voltage is also increased but this increase is continued up to a definite value of damping coefficient more than which, the dynamic pull-in voltage is constant and equal to the static one. The pull-in time is also determined for various damping coefficients and has been shown that with increasing the damping coefficient the pull-in time is increased.
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| ISSN: | 2306-8515 1726-5479 |