Finite Element Analysis of Static and Dynamic Pull-In Instability of a Fixed-Fixed Micro Beam Considering Damping Effects
In this paper the static and dynamic pull-in phenomenon of a fixed-fixed micro beam, considering the effects of residual stress, axial stress, damping coefficient, and Fringing field effects have statically and dynamically been analyzed. The nonlinear electromechanical coupled integro- differential...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
IFSA Publishing, S.L.
2009-04-01
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Series: | Sensors & Transducers |
Subjects: | |
Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_09/P_420.pdf |