Effect of methyl terminal and ethylene bridging groups on porous organosilicate glass films: FTIR, ellipsometric porosimetry, luminescence dataset

Effect of methyl terminal and ethylene bridging groups on porous organosilicate glass films: FTIR, ellipsometric porosimetry, luminescence dataset

A dataset in this report is regarding an article, “A detailed ellipsometric porosimetry and positron annihilation spectroscopy study of porous organosilicate glass films with various ratios of methyl terminal and ethylene bridging groups” [1]. The data of porous organosilicate glass (OSG) low-k film...

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Bibliographic Details
Main Authors: Md Rasadujjaman, Jinming Zhang, Konstantin P. Mogilnikov, Alexey S. Vishnevskiy, Jing Zhang, Mikhail R. Baklanov
Format: Article
Language:English
Published: Elsevier 2021-04-01
Series:Data in Brief
Subjects:
Organosilicate glass
Low-k films
Pore structure
Specific surface area
Fourier-transform infrared spectroscopy
Ellipsometric porosimetry
Online Access:http://www.sciencedirect.com/science/article/pii/S2352340921001797

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http://www.sciencedirect.com/science/article/pii/S2352340921001797

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