Sub-ppm NO<sub>2</sub> Sensing in Temperature Cycled Mode with Ga Doped ZnO Thin Films Deposited by RF Sputtering

Sub-ppm NO<sub>2</sub> Sensing in Temperature Cycled Mode with Ga Doped ZnO Thin Films Deposited by RF Sputtering

In this work Ga doped ZnO thin films have been deposited by RF magnetron sputtering onto a silicon micro-hotplate and their structural, microstructural and gas sensing properties have been studied. ZnO:Ga thin film with a thickness of 50 nm has been deposited onto a silicon based micro-hotplates wit...

Full description

Bibliographic Details
Main Authors: Lionel Presmanes, Vignesh Gunasekaran, Yohann Thimont, Inthuga Sinnarasa, Antoine Barnabe, Philippe Tailhades, Frédéric Blanc, Chabane Talhi, Philippe Menini
Format: Article
Language:English
Published: MDPI AG 2019-06-01
Series:Proceedings
Subjects:
n/a
Online Access:https://www.mdpi.com/2504-3900/14/1/48

Internet

https://www.mdpi.com/2504-3900/14/1/48

Similar Items