Properties of Erbium and Ytterbium Doped Gallium Nitride Layers Fabricated by Magnetron Sputtering
We report about some properties of erbium and erbium/ytterbium doped gallium nitride (GaN) layers fabricated by magnetron sputtering on<br />silicon, quartz and Corning glass substrates. For fabricating GaN layers two types of targets were used - gallium in a stainless steel cup and<br />...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
CTU Central Library
2006-01-01
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Series: | Acta Polytechnica |
Subjects: | |
Online Access: | https://ojs.cvut.cz/ojs/index.php/ap/article/view/900 |