Properties of Erbium and Ytterbium Doped Gallium Nitride Layers Fabricated by Magnetron Sputtering

We report about some properties of erbium and erbium/ytterbium doped gallium nitride (GaN) layers fabricated by magnetron sputtering on<br />silicon, quartz and Corning glass substrates. For fabricating GaN layers two types of targets were used - gallium in a stainless steel cup and<br />...

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Bibliographic Details
Main Authors: V. Prajzler, Z. Burian, I. Hüttel, J. Špirková, J. Hamáček, J. Oswald, J. Zavadil, V. Peřina
Format: Article
Language:English
Published: CTU Central Library 2006-01-01
Series:Acta Polytechnica
Subjects:
Online Access:https://ojs.cvut.cz/ojs/index.php/ap/article/view/900