Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition

Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition

Abstract We developed a newly designed system based on in situ monitoring with Fourier transform infrared (FT-IR) spectroscopy and quadrupole mass spectrometry (QMS) for understanding decomposition mechanism and by-products of vaporized Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) du...

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Bibliographic Details
Main Authors: Jong-Ki An, Eunmi Choi, Seob Shim, Hayeong Kim, Goru Kang, Ju-Young Yun
Format: Article
Language:English
Published: SpringerOpen 2020-09-01
Series:Nanoscale Research Letters
Subjects:
Thermal properties
In situ monitoring
FTIR&QMS
Precursor
CpZr[N(CH3)2]3
Online Access:http://link.springer.com/article/10.1186/s11671-020-03400-2

Internet

http://link.springer.com/article/10.1186/s11671-020-03400-2

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