Highly Sensitive InOx Ozone Sensing Films on Flexible Substrates
InOx thin films with a thickness of the order of 100 nm were grown by dc magnetron sputtering on glass, Si and flexible (PET) substrates. The electrical conductivity of InOx thin films exhibited a change of two orders of magnitude during photoreduction with ultraviolet light and subsequent oxidation...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2009-01-01
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| Series: | Journal of Sensors |
| Online Access: | http://dx.doi.org/10.1155/2009/727893 |