Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems

Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems

Parylene C is a promising material for constructing flexible, biocompatible and corrosion-resistant microelectromechanical systems (MEMS) devices. Historically, Parylene C has been employed as an encapsulation material for medical implants, such as stents and pacemakers, due to its strong barrier pr...

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Bibliographic Details
Main Authors: Jessica Ortigoza-Diaz, Kee Scholten, Christopher Larson, Angelica Cobo, Trevor Hudson, James Yoo, Alex Baldwin, Ahuva Weltman Hirschberg, Ellis Meng
Format: Article
Language:English
Published: MDPI AG 2018-08-01
Series:Micromachines
Subjects:
Parylene
microfabrication
MEMS
Online Access:http://www.mdpi.com/2072-666X/9/9/422

Internet

http://www.mdpi.com/2072-666X/9/9/422

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