Real-Time and Label-Free Chemical Sensor-on-a-chip using Monolithic Si-on-BaTiO3 Mid-Infrared waveguides
Abstract Chip-scale chemical detection is demonstrated by using mid-Infrared (mid-IR) photonic circuits consisting of amorphous silicon (a-Si) waveguides on an epitaxial barium titanate (BaTiO3, BTO) thin film. The highly c-axis oriented BTO film was grown by the pulsed laser deposition (PLD) method...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Publishing Group
2017-07-01
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Series: | Scientific Reports |
Online Access: | https://doi.org/10.1038/s41598-017-05711-4 |