Magnification inferred curvature for real-time curvature monitoring
Abstract The in situ and real-time measurement of curvature changes of optically reflecting surfaces is a key element to better control bottom-up fabrication processes in the semiconductor industry, but also to follow or adjust mirror deformations during fabrication and use for space or optics indus...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2021-04-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-021-88722-6 |