Micro-fabricated flexible PZT cantilever using d33 mode for energy harvesting

Micro-fabricated flexible PZT cantilever using d33 mode for energy harvesting

Abstract This paper presents a micro-fabricated flexible and curled PZT [Pb(Zr0.52Ti0.48)O3] cantilever using d33 piezoelectric mode for vibration based energy harvesting applications. The proposed cantilever based energy harvester consists of polyimide, PZT thin film, and inter-digitated IrOx elect...

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Bibliographic Details
Main Authors: Hyunok Cho, Jongcheol Park, Jae Yeong Park
Format: Article
Language:English
Published: SpringerOpen 2017-04-01
Series:Micro and Nano Systems Letters
Subjects:
Flexible
PZT
Cantilever
MEMS
Energy harvesting
Online Access:http://link.springer.com/article/10.1186/s40486-017-0054-x

Internet

http://link.springer.com/article/10.1186/s40486-017-0054-x

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